re: How to fill in chips in concrete from Demolition hammer ?

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. Get a small bag of concrete floor leveler.

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This is what a professional would do and what's been recommended to me in similar situations. And it does dry fast so make a small batch first to get the hang of it.

Although for me I'd probably be a cheap arse and just use thinset. I just can't imagine those small spots that were filled with a less than perfect material being a problem. But be sure and let thinset dry so you don't scrape chunks if it out when going to town with notched trowel before tiling. Will need about a day to dry good enough.